diff --git a/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F070RB/CMakeLists.txt b/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F070RB/CMakeLists.txt
index 789210c18e..7f82a1a2a9 100644
--- a/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F070RB/CMakeLists.txt
+++ b/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F070RB/CMakeLists.txt
@@ -2,11 +2,11 @@
 # SPDX-License-Identifier: Apache-2.0
 
 if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
-    set(STARTUP_FILE TOOLCHAIN_GCC_ARM/startup_stm32f070xb.S)
-    set(LINKER_FILE TOOLCHAIN_GCC_ARM/STM32F070XB.ld)
+    set(STARTUP_FILE device/TOOLCHAIN_GCC_ARM/startup_stm32f070xb.S)
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/STM32F070XB.ld)
 elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
-    set(STARTUP_FILE TOOLCHAIN_ARM/startup_stm32f070xb.S)
-    set(LINKER_FILE TOOLCHAIN_ARM/stm32f070xb.sct)
+    set(STARTUP_FILE device/TOOLCHAIN_ARM/startup_stm32f070xb.S)
+    set(LINKER_FILE device/TOOLCHAIN_ARM/stm32f070xb.sct)
 endif()
 
 set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
diff --git a/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F072RB/CMakeLists.txt b/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F072RB/CMakeLists.txt
index 08e70044ac..0bb99ed4d4 100644
--- a/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F072RB/CMakeLists.txt
+++ b/targets/TARGET_STM/TARGET_STM32F0/TARGET_NUCLEO_F072RB/CMakeLists.txt
@@ -2,11 +2,11 @@
 # SPDX-License-Identifier: Apache-2.0
 
 if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
-    set(STARTUP_FILE TOOLCHAIN_GCC_ARM/startup_stm32f072xb.S)
-    set(LINKER_FILE TOOLCHAIN_GCC_ARM/STM32F072XB.ld)
+    set(STARTUP_FILE device/TOOLCHAIN_GCC_ARM/startup_stm32f072xb.S)
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/STM32F072XB.ld)
 elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
-    set(STARTUP_FILE TOOLCHAIN_ARM/startup_stm32f072xb.S)
-    set(LINKER_FILE TOOLCHAIN_ARM/stm32f072xb.sct)
+    set(STARTUP_FILE device/TOOLCHAIN_ARM/startup_stm32f072xb.S)
+    set(LINKER_FILE device/TOOLCHAIN_ARM/stm32f072xb.sct)
 endif()
 
 set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
diff --git a/targets/TARGET_STM/TARGET_STM32F0/TARGET_STM32F091xC/CMakeLists.txt b/targets/TARGET_STM/TARGET_STM32F0/TARGET_STM32F091xC/CMakeLists.txt
index bac0a15710..a5a701dd82 100644
--- a/targets/TARGET_STM/TARGET_STM32F0/TARGET_STM32F091xC/CMakeLists.txt
+++ b/targets/TARGET_STM/TARGET_STM32F0/TARGET_STM32F091xC/CMakeLists.txt
@@ -6,11 +6,11 @@ if("NUCLEO_F091RC" IN_LIST MBED_TARGET_LABELS)
 endif()
 
 if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
-    set(STARTUP_FILE TOOLCHAIN_GCC_ARM/startup_stm32f091xc.S)
-    set(LINKER_FILE TOOLCHAIN_GCC_ARM/STM32F091XC.ld)
+    set(STARTUP_FILE device/TOOLCHAIN_GCC_ARM/startup_stm32f091xc.S)
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/STM32F091XC.ld)
 elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
-    set(STARTUP_FILE TOOLCHAIN_ARM/startup_stm32f091xc.S)
-    set(LINKER_FILE TOOLCHAIN_ARM/stm32f091rc.sct)
+    set(STARTUP_FILE device/TOOLCHAIN_ARM/startup_stm32f091xc.S)
+    set(LINKER_FILE device/TOOLCHAIN_ARM/stm32f091rc.sct)
 endif()
 
 set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})