diff --git a/targets/CMakeLists.txt b/targets/CMakeLists.txt
new file mode 100644
index 0000000000..1216671bd7
--- /dev/null
+++ b/targets/CMakeLists.txt
@@ -0,0 +1,6 @@
+# SPDX-License-Identifier: Apache-2.0
+
+# Add target directories by appending the prefix below to the labels defined
+# by MBED_OS_TARGET_LABELS in ../cmake/target.cmake
+
+mbed_add_cmake_directory_if_labels("TARGET")
diff --git a/targets/TARGET_Freescale/CMakeLists.txt b/targets/TARGET_Freescale/CMakeLists.txt
new file mode 100644
index 0000000000..f45e97c493
--- /dev/null
+++ b/targets/TARGET_Freescale/CMakeLists.txt
@@ -0,0 +1,14 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_include_directories(mbed-os
+    PUBLIC
+        ${CMAKE_CURRENT_SOURCE_DIR}
+)
+
+target_sources(mbed-os
+    PRIVATE
+        USBPhy_Kinetis.cpp
+)
+
+mbed_add_cmake_directory_if_labels("TARGET")
diff --git a/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/CMakeLists.txt b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/CMakeLists.txt
new file mode 100644
index 0000000000..ccb2cad2fe
--- /dev/null
+++ b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/CMakeLists.txt
@@ -0,0 +1,28 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_sources(mbed-os
+    PRIVATE
+        fsl_common.c
+
+        api/analogin_api.c
+        api/analogout_api.c
+        api/dma_api.c
+        api/flash_api.c
+        api/gpio_api.c
+        api/gpio_irq_api.c
+        api/i2c_api.c
+        api/lp_ticker.c
+        api/pinmap.c
+        api/port_api.c
+        api/qspi_api.c
+        api/rtc_api.c
+        api/sleep.c
+)
+
+target_include_directories(mbed-os
+    PUBLIC
+        api
+)
+
+mbed_add_cmake_directory_if_labels("TARGET")
diff --git a/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/CMakeLists.txt b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/CMakeLists.txt
new file mode 100644
index 0000000000..03ca3f527f
--- /dev/null
+++ b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/CMakeLists.txt
@@ -0,0 +1,61 @@
+# SPDX-License-Identifier: Apache-2.0
+
+add_subdirectory(device)
+
+mbed_add_cmake_directory_if_labels("TARGET")
+
+target_sources(mbed-os
+    PRIVATE
+        mbed_crc_api.c
+        pwmout_api.c
+        reset_reason.c
+        serial_api.c
+        spi_api.c
+        trng_api.c
+        us_ticker.c
+        watchdog_api.c
+
+        drivers/fsl_adc16.c
+        drivers/fsl_clock.c
+        drivers/fsl_cmp.c
+        drivers/fsl_cmt.c
+        drivers/fsl_crc.c
+        drivers/fsl_dac.c
+        drivers/fsl_dmamux.c
+        drivers/fsl_dspi.c
+        drivers/fsl_dspi_edma.c
+        drivers/fsl_edma.c
+        drivers/fsl_enet.c
+        drivers/fsl_ewm.c
+        drivers/fsl_flash.c
+        drivers/fsl_flexbus.c
+        drivers/fsl_flexcan.c
+        drivers/fsl_ftm.c
+        drivers/fsl_gpio.c
+        drivers/fsl_i2c.c
+        drivers/fsl_i2c_edma.c
+        drivers/fsl_llwu.c
+        drivers/fsl_lptmr.c
+        drivers/fsl_pdb.c
+        drivers/fsl_pit.c
+        drivers/fsl_pmc.c
+        drivers/fsl_rcm.c
+        drivers/fsl_rnga.c
+        drivers/fsl_rtc.c
+        drivers/fsl_sai.c
+        drivers/fsl_sai_edma.c
+        drivers/fsl_sdhc.c
+        drivers/fsl_sim.c
+        drivers/fsl_smc.c
+        drivers/fsl_sysmpu.c
+        drivers/fsl_uart.c
+        drivers/fsl_uart_edma.c
+        drivers/fsl_vref.c
+        drivers/fsl_wdog.c
+)
+
+target_include_directories(mbed-os
+    PUBLIC
+        ${CMAKE_CURRENT_SOURCE_DIR}
+        drivers
+)
diff --git a/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/TARGET_FRDM/CMakeLists.txt b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/TARGET_FRDM/CMakeLists.txt
new file mode 100644
index 0000000000..5185973ae9
--- /dev/null
+++ b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/TARGET_FRDM/CMakeLists.txt
@@ -0,0 +1,15 @@
+# SPDX-License-Identifier: Apache-2.0
+
+target_sources(mbed-os
+    PRIVATE
+        crc.c
+        fsl_clock_config.c
+        fsl_phy.c
+        mbed_overrides.c
+        PeripheralPins.c
+)
+
+target_include_directories(mbed-os
+    PUBLIC
+        ${CMAKE_CURRENT_SOURCE_DIR}
+)
diff --git a/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/CMakeLists.txt b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/CMakeLists.txt
new file mode 100644
index 0000000000..5bd03558b4
--- /dev/null
+++ b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/CMakeLists.txt
@@ -0,0 +1,36 @@
+# SPDX-License-Identifier: Apache-2.0
+
+function(_mbed_get_assembly_k64f)
+    if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+        set(STARTUP_FILE TOOLCHAIN_GCC_ARM/startup_MK64F12.S)
+    elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+        set(STARTUP_FILE TOOLCHAIN_ARM_STD/startup_MK64F12.S)
+    elseif(${MBED_TOOLCHAIN} STREQUAL "IAR")
+        set(STARTUP_FILE TOOLCHAIN_IAR/startup_MK64F12.S)
+    endif()
+    target_sources(mbed-os PRIVATE ${STARTUP_FILE})
+endfunction()
+
+function(_mbed_set_linker_file)
+    if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+        set(LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/TOOLCHAIN_GCC_ARM/MK64FN1M0xxx12.ld)
+    elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+        set(LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/TOOLCHAIN_ARM_STD/MK64FN1M0xxx12.sct)
+    elseif(${MBED_TOOLCHAIN} STREQUAL "IAR")
+        set(LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/TOOLCHAIN_IAR/MK64FN1M0xxx12.icf)
+    endif()
+    set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${LINKER_FILE})
+endfunction()
+
+_mbed_get_assembly_k64f()
+_mbed_set_linker_file()
+
+target_sources(mbed-os
+    PRIVATE
+        system_MK64F12.c
+)
+
+target_include_directories(mbed-os
+    PUBLIC
+        ${CMAKE_CURRENT_SOURCE_DIR}
+)
diff --git a/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/TOOLCHAIN_ARM_STD/MK64FN1M0xxx12.sct b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/TOOLCHAIN_ARM_STD/MK64FN1M0xxx12.sct
index e790bbcfe2..c81a730032 100644
--- a/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/TOOLCHAIN_ARM_STD/MK64FN1M0xxx12.sct
+++ b/targets/TARGET_Freescale/TARGET_MCUXpresso_MCUS/TARGET_MCU_K64F/device/TOOLCHAIN_ARM_STD/MK64FN1M0xxx12.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 /*
 ** ###################################################################
 **     Processors:          MK64FN1M0CAJ12