diff --git a/targets/CMakeLists.txt b/targets/CMakeLists.txt
index abbd598c61..d037f618b3 100644
--- a/targets/CMakeLists.txt
+++ b/targets/CMakeLists.txt
@@ -6,7 +6,9 @@ if("ARM_FM" IN_LIST MBED_TARGET_LABELS)
 elseif("Freescale" IN_LIST MBED_TARGET_LABELS)
     add_subdirectory(TARGET_Freescale)
 elseif("NORDIC" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_NORDIC)     
+    add_subdirectory(TARGET_NORDIC)
 elseif("STM" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_STM)    
+    add_subdirectory(TARGET_STM)
+elseif("NUVOTON" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NUVOTON) 
 endif()
diff --git a/targets/TARGET_NUVOTON/CMakeLists.txt b/targets/TARGET_NUVOTON/CMakeLists.txt
new file mode 100644
index 0000000000..8d6e31bb5b
--- /dev/null
+++ b/targets/TARGET_NUVOTON/CMakeLists.txt
@@ -0,0 +1,31 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("M2351" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M2351)
+elseif("M251" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M251)
+elseif("M261" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M261)
+elseif("M451" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M451)
+elseif("M480" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M480)
+elseif("NANO100" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NANO100)
+elseif("NUC472" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NUC472)
+endif()
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
+
+target_sources(mbed-core
+    INTERFACE
+        nu_miscutil.c
+        nu_modutil.c
+        nu_timer.c
+        USBEndpoints_Nuvoton.cpp
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/CMakeLists.txt
new file mode 100644
index 0000000000..205841886b
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/CMakeLists.txt
@@ -0,0 +1,90 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("M23_NS" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M23_NS)
+elseif("M23_S" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_M23_S)
+elseif("NU_PFM_M2351" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NU_PFM_M2351)
+endif()
+
+target_sources(mbed-core
+    INTERFACE
+        dma_api.c
+        flash_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        gpio_object.h
+        hal_secure.h
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        objects.h
+        PeripheralNames.h
+        PeripheralPins.c
+        PeripheralPins.h
+        pinmap.c
+        PinNamesCommon.h
+        PortNames.h
+        port_api.c
+        pwmout_api.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        trng_api.cpp
+        us_ticker.c
+        trng_api.cpp
+
+        crypto/crypto-misc.cpp
+
+        device/StdDriver/src/m2351_acmp.c
+        device/StdDriver/src/m2351_bpwm.c
+        device/StdDriver/src/m2351_can.c
+        device/StdDriver/src/m2351_clk.c
+        device/StdDriver/src/m2351_crc.c
+        device/StdDriver/src/m2351_crypto.c
+        device/StdDriver/src/m2351_dac.c
+        device/StdDriver/src/m2351_eadc.c
+        device/StdDriver/src/m2351_ebi.c
+        device/StdDriver/src/m2351_ecap.c
+        device/StdDriver/src/m2351_epwm.c
+        device/StdDriver/src/m2351_fmc.c
+        device/StdDriver/src/m2351_gpio.c
+        device/StdDriver/src/m2351_i2c.c
+        device/StdDriver/src/m2351_i2s.c
+        device/StdDriver/src/m2351_pdma.c
+        device/StdDriver/src/m2351_qei.c
+        device/StdDriver/src/m2351_qspi.c
+        device/StdDriver/src/m2351_rtc.c
+        device/StdDriver/src/m2351_sc.c
+        device/StdDriver/src/m2351_scuart.c
+        device/StdDriver/src/m2351_sdh.c
+        device/StdDriver/src/m2351_spi.c
+        device/StdDriver/src/m2351_sys.c
+        device/StdDriver/src/m2351_timer.c
+        device/StdDriver/src/m2351_timer_pwm.c
+        device/StdDriver/src/m2351_uart.c
+        device/StdDriver/src/m2351_usbd.c
+        device/StdDriver/src/m2351_usci_i2c.c
+        device/StdDriver/src/m2351_usci_spi.c
+        device/StdDriver/src/m2351_usci_uart.c
+        device/StdDriver/src/m2351_wdt.c
+        device/StdDriver/src/m2351_wwdt.c
+        device/stddriver_secure.c
+        device/stddriver_secure.h
+        device/system_core_M2351.h
+        device/system_M2351.c
+        device/system_M2351.h
+        device/startup_M2351.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        device
+        device/Reg
+        device/StdDriver/inc
+        crypto
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/CMakeLists.txt
new file mode 100644
index 0000000000..90b258e7db
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/CMakeLists.txt
@@ -0,0 +1,17 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("NU_PFM_M2351_NPSA_NS" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NU_PFM_M2351_NPSA_NS)
+elseif("NU_PFM_M2351_NS" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NU_PFM_M2351_NS)
+elseif("TFM" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_TFM)  
+endif()
+
+add_subdirectory(device)
+
+target_sources(mbed-core
+    INTERFACE
+        wait_ns.c
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/TARGET_TFM/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/TARGET_TFM/CMakeLists.txt
new file mode 100644
index 0000000000..8f8f21b08c
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/TARGET_TFM/CMakeLists.txt
@@ -0,0 +1,7 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_sources(mbed-core
+    INTERFACE
+        tfm_ns_lock_rtx.c
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/CMakeLists.txt
new file mode 100644
index 0000000000..922d0d8025
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/CMakeLists.txt
@@ -0,0 +1,14 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("TFM" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_TFM)
+endif()
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE TOOLCHAIN_GCC_ARM/M2351.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE TOOLCHAIN_ARMC6/M2351.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TARGET_TFM/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TARGET_TFM/CMakeLists.txt
new file mode 100644
index 0000000000..87df1a7319
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TARGET_TFM/CMakeLists.txt
@@ -0,0 +1,12 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_sources(mbed-core
+    INTERFACE
+        cmsis_nvic_virtual.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct
index 944c8fc35c..c75d65f6b9 100644
--- a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct
@@ -1,4 +1,4 @@
-#! armclang -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m23
 
 /*
  * Copyright (c) 2018-2019, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_S/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_S/CMakeLists.txt
new file mode 100644
index 0000000000..47a286c86e
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_S/CMakeLists.txt
@@ -0,0 +1,14 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("TFM" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_TFM)
+endif()
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/M2351.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TOOLCHAIN_ARM_STD/M2351.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_S/TARGET_TFM/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_S/TARGET_TFM/CMakeLists.txt
new file mode 100644
index 0000000000..b92c71eedb
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_S/TARGET_TFM/CMakeLists.txt
@@ -0,0 +1,13 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_sources(mbed-core
+    INTERFACE
+        target_cfg.cpp
+        spm_hal.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_NU_PFM_M2351/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_NU_PFM_M2351/CMakeLists.txt
new file mode 100644
index 0000000000..5c029ccc7a
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_NU_PFM_M2351/CMakeLists.txt
@@ -0,0 +1,7 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M251/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M251/CMakeLists.txt
new file mode 100644
index 0000000000..68e5c30aac
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M251/CMakeLists.txt
@@ -0,0 +1,75 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("NUMAKER_IOT_M252" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NUMAKER_IOT_M252)    
+endif()
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/M251.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TOOLCHAIN_ARM_STD/M251.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+target_sources(mbed-core
+    INTERFACE
+        analogin_api.c
+        analogout_api.c
+        device/startup_M251.c
+        device/StdDriver/src/m251_acmp.c
+        device/StdDriver/src/m251_bpwm.c
+        device/StdDriver/src/m251_clk.c
+        device/StdDriver/src/m251_crc.c
+        device/StdDriver/src/m251_crypto.c
+        device/StdDriver/src/m251_dac.c
+        device/StdDriver/src/m251_eadc.c
+        device/StdDriver/src/m251_ebi.c
+        device/StdDriver/src/m251_fmc.c
+        device/StdDriver/src/m251_gpio.c
+        device/StdDriver/src/m251_i2c.c
+        device/StdDriver/src/m251_pdma.c
+        device/StdDriver/src/m251_pwm.c
+        device/StdDriver/src/m251_qspi.c
+        device/StdDriver/src/m251_rtc.c
+        device/StdDriver/src/m251_sc.c
+        device/StdDriver/src/m251_scuart.c
+        device/StdDriver/src/m251_spi.c
+        device/StdDriver/src/m251_sys.c
+        device/StdDriver/src/m251_timer.c
+        device/StdDriver/src/m251_timer_pwm.c
+        device/StdDriver/src/m251_uart.c
+        device/StdDriver/src/m251_usbd.c
+        device/StdDriver/src/m251_usci_i2c.c
+        device/StdDriver/src/m251_usci_spi.c
+        device/StdDriver/src/m251_usci_uart.c
+        device/StdDriver/src/m251_wdt.c
+        device/StdDriver/src/m251_wwdt.c
+        device/system_M251.c
+
+        dma_api.c
+        flash_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        PeripheralPins.c
+        pinmap.c
+        port_api.c
+        pwmout_api.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        us_ticker.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        device
+        device/Reg
+        device/StdDriver/inc
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M251/TARGET_NUMAKER_IOT_M252/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M251/TARGET_NUMAKER_IOT_M252/CMakeLists.txt
new file mode 100644
index 0000000000..5c029ccc7a
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M251/TARGET_NUMAKER_IOT_M252/CMakeLists.txt
@@ -0,0 +1,7 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct b/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct
index e8a86e0f23..46871453b8 100644
--- a/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct
@@ -1,4 +1,4 @@
-#! armclang -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m23
 
 /*
  * Copyright (c) 2019, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M261/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M261/CMakeLists.txt
new file mode 100644
index 0000000000..df10fbc39d
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M261/CMakeLists.txt
@@ -0,0 +1,86 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("NUMAKER_IOT_M263A" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NUMAKER_IOT_M263A)
+endif()
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/M261.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TOOLCHAIN_ARM_STD/M261.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+target_sources(mbed-core
+    INTERFACE
+        analogin_api.c
+        analogout_api.c
+        device/startup_M261.c
+        device/system_M251.c
+
+        device/StdDriver/m261_acmp.c
+        device/StdDriver/m261_bpwm.c
+        device/StdDriver/m261_can.c
+        device/StdDriver/m261_clk.c
+        device/StdDriver/m261_crc.c
+        device/StdDriver/m261_crypto.c
+        device/StdDriver/m261_dac.c
+        device/StdDriver/m261_eadc.c
+        device/StdDriver/m261_ebi.c
+        device/StdDriver/m261_ecap.c
+        device/StdDriver/m261_epwm.c
+        device/StdDriver/m261_fmc.c
+        device/StdDriver/m261_gpio.c
+        device/StdDriver/m261_i2c.c
+        device/StdDriver/m261_i2s.c
+        device/StdDriver/m261_pdma.c
+        device/StdDriver/m261_qei.c
+        device/StdDriver/m261_qspi.c
+        device/StdDriver/m261_rtc.c
+        device/StdDriver/m261_sc.c
+        device/StdDriver/m261_scuart.c
+        device/StdDriver/m261_sdh.c
+        device/StdDriver/m261_spi.c
+        device/StdDriver/m261_sys.c
+        device/StdDriver/m261_timer.c
+        device/StdDriver/m261_timer_pwm.c
+        device/StdDriver/m261_uart.c
+        device/StdDriver/m261_usbd.c
+        device/StdDriver/m261_usci_i2c.c
+        device/StdDriver/m261_usci_spi.c
+        device/StdDriver/m261_usci_uart.c
+        device/StdDriver/m261_wdt.c
+        device/StdDriver/m261_wwdt.c
+
+
+        dma_api.c
+        flash_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        PeripheralPins.c
+        pinmap.c
+        port_api.c
+        pwmout_api.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        trng_api.cpp
+        us_ticker.c
+
+        crypto/crypto-misc.cpp
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        crypto
+        device
+        device/Reg
+        device/StdDriver/inc
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M261/TARGET_NUMAKER_IOT_M263A/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M261/TARGET_NUMAKER_IOT_M263A/CMakeLists.txt
new file mode 100644
index 0000000000..5c029ccc7a
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M261/TARGET_NUMAKER_IOT_M263A/CMakeLists.txt
@@ -0,0 +1,7 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct b/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct
index 699faa7e91..0e2e8e3031 100644
--- a/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct
@@ -1,4 +1,4 @@
-#! armclang -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m23
 
 /*
  * Copyright (c) 2019-2020, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M451/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M451/CMakeLists.txt
new file mode 100644
index 0000000000..8f84667cdc
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M451/CMakeLists.txt
@@ -0,0 +1,69 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/M453.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TOOLCHAIN_ARM/M453.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+target_sources(mbed-core
+    INTERFACE
+        analogin_api.c
+        analogout_api.c
+        can_api.c
+
+        device/startup_M451Series.c
+        device/system_M451Series.c
+        device/StdDriver/m451_acmp.c
+        device/StdDriver/m451_can.c
+        device/StdDriver/m451_clk.c
+        device/StdDriver/m451_crc.c
+        device/StdDriver/m451_dac.c
+        device/StdDriver/m451_eadc.c
+        device/StdDriver/m451_ebi.c
+        device/StdDriver/m451_fmc.c
+        device/StdDriver/m451_gpio.c
+        device/StdDriver/m451_i2c.c
+        device/StdDriver/m451_pdma.c
+        device/StdDriver/m451_pwm.c
+        device/StdDriver/m451_rtc.c
+        device/StdDriver/m451_sc.c
+        device/StdDriver/m451_scuart.c
+        device/StdDriver/m451_spi.c
+        device/StdDriver/m451_sys.c
+        device/StdDriver/m451_timer.c
+        device/StdDriver/m451_tk.c
+        device/StdDriver/m451_uart.c
+        device/StdDriver/m451_usbd.c
+        device/StdDriver/m451_wdt.c
+        device/StdDriver/m451_wwdt.c
+
+        dma_api.c
+        flash_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        PeripheralPins.c
+        pinmap.c
+        port_api.c
+        pwmout_api.c
+        reset_reason.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        us_ticker.c
+        watchdog_api.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        device
+        device/StdDriver
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct b/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct
index d78f382765..9f7520c7f9 100644
--- a/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 /*
  * Copyright (c) 2020, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M480/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M480/CMakeLists.txt
new file mode 100644
index 0000000000..9dba07afad
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M480/CMakeLists.txt
@@ -0,0 +1,93 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if("NUMAKER_IOT_M487" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NUMAKER_IOT_M487)
+elseif("NUMAKER_PFM_M487" IN_LIST MBED_TARGET_LABELS)
+    add_subdirectory(TARGET_NUMAKER_PFM_M487) 
+endif()
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/M487.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TOOLCHAIN_ARM_STD/M487.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+target_sources(mbed-core
+    INTERFACE
+        analogin_api.c
+        analogout_api.c
+        can_api.c
+
+        crypto/crypto-misc.cpp
+        device/startup_M480.c
+        device/system_M480.c
+        device/StdDriver/src/m480_acmp.c
+        device/StdDriver/src/m480_bpwm.c
+        device/StdDriver/src/m480_can.c
+        device/StdDriver/src/m480_ccap.c
+        device/StdDriver/src/m480_clk.c
+        device/StdDriver/src/m480_crc.c
+        device/StdDriver/src/m480_crypto.c
+        device/StdDriver/src/m480_dac.c
+        device/StdDriver/src/m480_eadc.c
+        device/StdDriver/src/m480_ebi.c
+        device/StdDriver/src/m480_ecap.c
+        device/StdDriver/src/m480_emac.c
+        device/StdDriver/src/m480_epwm.c
+        device/StdDriver/src/m480_fmc.c
+        device/StdDriver/src/m480_gpio.c
+        device/StdDriver/src/m480_hsusbd.c
+        device/StdDriver/src/m480_i2c.c
+        device/StdDriver/src/m480_i2s.c
+        device/StdDriver/src/m480_pdma.c
+        device/StdDriver/src/m480_qei.c
+        device/StdDriver/src/m480_qspi.c
+        device/StdDriver/src/m480_rtc.c
+        device/StdDriver/src/m480_sc.c
+        device/StdDriver/src/m480_scuart.c
+        device/StdDriver/src/m480_sdh.c
+        device/StdDriver/src/m480_spi.c
+        device/StdDriver/src/m480_spim.c
+        device/StdDriver/src/m480_sys.c
+        device/StdDriver/src/m480_timer.c
+        device/StdDriver/src/m480_timer_pwm.c
+        device/StdDriver/src/m480_trng.c
+        device/StdDriver/src/m480_uart.c
+        device/StdDriver/src/m480_usbd.c
+        device/StdDriver/src/m480_usci_i2c.c
+        device/StdDriver/src/m480_usci_spi.c
+        device/StdDriver/src/m480_usci_uart.c
+        device/StdDriver/src/m480_wdt.c
+        device/StdDriver/src/m480_wwdt.c
+
+        dma_api.c
+        flash_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        PeripheralPins.c
+        pinmap.c
+        port_api.c
+        pwmout_api.c
+        reset_reason.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        us_ticker.c
+        watchdog_api.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        crypto
+        device
+        device/Reg
+        device/StdDriver/inc
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M480/TARGET_NUMAKER_IOT_M487/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M480/TARGET_NUMAKER_IOT_M487/CMakeLists.txt
new file mode 100644
index 0000000000..5c029ccc7a
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M480/TARGET_NUMAKER_IOT_M487/CMakeLists.txt
@@ -0,0 +1,7 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M480/TARGET_NUMAKER_PFM_M487/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_M480/TARGET_NUMAKER_PFM_M487/CMakeLists.txt
new file mode 100644
index 0000000000..5c029ccc7a
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_M480/TARGET_NUMAKER_PFM_M487/CMakeLists.txt
@@ -0,0 +1,7 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct b/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct
index f83d94d684..c0b5592bfa 100644
--- a/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 /*
  * Copyright (c) 2015-2016, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_NANO100/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_NANO100/CMakeLists.txt
new file mode 100644
index 0000000000..5cd351edaf
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_NANO100/CMakeLists.txt
@@ -0,0 +1,68 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/NANO130.ld)
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TOOLCHAIN_ARM/NANO130.sct)
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+target_sources(mbed-core
+    INTERFACE
+        device/cmsis_nvic.c
+        device/startup_Nano100Series.c
+        device/system_Nano100Series.c
+
+        device/StdDriver/nano100_adc.c
+        device/StdDriver/nano100_clk.c
+        device/StdDriver/nano100_crc.c
+        device/StdDriver/nano100_dac.c
+        device/StdDriver/nano100_ebi.c
+        device/StdDriver/nano100_fmc.c
+        device/StdDriver/nano100_gpio.c
+        device/StdDriver/nano100_i2c.c
+        device/StdDriver/nano100_i2s.c
+        device/StdDriver/nano100_lcd.c
+        device/StdDriver/nano100_pdma.c
+        device/StdDriver/nano100_pwm.c
+        device/StdDriver/nano100_rtc.c
+        device/StdDriver/nano100_sc.c
+        device/StdDriver/nano100_scuart.c
+        device/StdDriver/nano100_spi.c
+        device/StdDriver/nano100_sys.c
+        device/StdDriver/nano100_timer.c
+        device/StdDriver/nano100_uart.c
+        device/StdDriver/nano100_usbd.c
+        device/StdDriver/nano100_wdt.c
+        device/StdDriver/nano100_wwdt.c
+
+        analogin_api.c
+        analogout_api.c
+        dma_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        PeripheralPins.c
+        pinmap.c
+        port_api.c
+        pwmout_api.c
+        reset_reason.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        us_ticker.c
+        wait_ns.c
+        watchdog_api.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        device
+        device/StdDriver
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_NUC472/CMakeLists.txt b/targets/TARGET_NUVOTON/TARGET_NUC472/CMakeLists.txt
new file mode 100644
index 0000000000..5da522f7ec
--- /dev/null
+++ b/targets/TARGET_NUVOTON/TARGET_NUC472/CMakeLists.txt
@@ -0,0 +1,83 @@
+# Copyright (c) 2020 ARM Limited. All rights reserved.
+# SPDX-License-Identifier: Apache-2.0
+
+if(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    if("NU_XRAM_SUPPORTED" IN_LIST MBED_TARGET_LABELS)
+        set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/TARGET_NU_XRAM_SUPPORTED/NUC472.ld)
+    elseif("NU_XRAM_UNSUPPORTED" IN_LIST MBED_TARGET_LABELS)
+        set(LINKER_FILE device/TOOLCHAIN_GCC_ARM/TARGET_NU_XRAM_UNSUPPORTED/NUC472.ld)
+    endif()
+elseif(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    if("NU_XRAM_SUPPORTED" IN_LIST MBED_TARGET_LABELS)
+        set(LINKER_FILE device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct)
+    elseif("NU_XRAM_UNSUPPORTED" IN_LIST MBED_TARGET_LABELS)
+        set(LINKER_FILE device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct)
+    endif()
+endif()
+
+set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+target_sources(mbed-core
+    INTERFACE
+        crypto/crypto-misc.cpp
+
+        analogin_api.c
+        can_api.c
+        crypto/crypto-misc.cpp
+        device/startup_NUC472_442.c
+        device/StdDriver/nuc472_acmp.c
+        device/StdDriver/nuc472_adc.c
+        device/StdDriver/nuc472_can.c
+        device/StdDriver/nuc472_clk.c
+        device/StdDriver/nuc472_crypto.c
+        device/StdDriver/nuc472_eadc.c
+        device/StdDriver/nuc472_ebi.c
+        device/StdDriver/nuc472_emac.c
+        device/StdDriver/nuc472_fmc.c
+        device/StdDriver/nuc472_gpio.c
+        device/StdDriver/nuc472_i2c.c
+        device/StdDriver/nuc472_i2s.c
+        device/StdDriver/nuc472_pdma.c
+        device/StdDriver/nuc472_ps2.c
+        device/StdDriver/nuc472_pwm.c
+        device/StdDriver/nuc472_rtc.c
+        device/StdDriver/nuc472_sc.c
+        device/StdDriver/nuc472_scuart.c
+        device/StdDriver/nuc472_sd.c
+        device/StdDriver/nuc472_spi.c
+        device/StdDriver/nuc472_sys.c
+        device/StdDriver/nuc472_timer.c
+        device/StdDriver/nuc472_uart.c
+        device/StdDriver/nuc472_usbd.c
+        device/StdDriver/nuc472_wdt.c
+        device/StdDriver/nuc472_wwdt.c
+        device/system_NUC472_442.c
+
+        dma_api.c
+        flash_api.c
+        gpio_api.c
+        gpio_irq_api.c
+        i2c_api.c
+        lp_ticker.c
+        mbed_overrides.c
+        PeripheralPins.c
+        pinmap.c
+        port_api.c
+        pwmout_api.c
+        reset_reason.c
+        rtc_api.c
+        serial_api.c
+        sleep.c
+        spi_api.c
+        us_ticker.c
+        wait_ns.c
+        watchdog_api.c
+)
+
+target_include_directories(mbed-core
+    INTERFACE
+        .
+        crypto
+        device
+        device/StdDriver
+)
diff --git a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct
index bea9a129ac..b6788ca8d0 100644
--- a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct
+++ b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 #if !defined(MBED_APP_START)
   #define MBED_APP_START 0x00000000
diff --git a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct
index c2eaa21324..108cdef2e7 100644
--- a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct
+++ b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 #if !defined(MBED_APP_START)
   #define MBED_APP_START 0x00000000